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Fundamentals of microfabrication and nanotechnology /
紀錄類型:
書目-語言資料,印刷品 : 單行本
正題名/作者:
Fundamentals of microfabrication and nanotechnology // Marc J. Madou.
作者:
Madou, Marc J.
出版者:
Boca Raton, FL :CRC Press,c2012.
面頁冊數:
3 v. :ill. (some col.) ;29 cm.
標題:
Microelectromechanical systems. -
電子資源:
Click to ask Cornell University Library to RUSH purchase. We will contact you by email when it arrives (typically within a week).
ISBN:
9781420055160 (v. 3) :
ISBN:
142005516X (v. 3)
ISBN:
9781420055191 (v. 2) :
ISBN:
1420055194 (v. 2)
ISBN:
9781420055115 (v. 1)
ISBN:
1420055119 (v. 1)
Fundamentals of microfabrication and nanotechnology /
Madou, Marc J.
Fundamentals of microfabrication and nanotechnology /
Marc J. Madou. - 3rd ed. - Boca Raton, FL :CRC Press,c2012. - 3 v. :ill. (some col.) ;29 cm.
Includes bibliographical references and indexes.
v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-NEMS, Manufacturaing techniques and applications.
"Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download, along with a solutions manual for qualifying instructors"--
ISBN: 9781420055160 (v. 3) :NT2884
LCCN: 2011014406Subjects--Topical Terms:
155435
Microelectromechanical systems.
LC Class. No.: TK7875 / M33 2012
Dewey Class. No.: 621.381
Fundamentals of microfabrication and nanotechnology /
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"In Solid State Physics, Fluidics and Analytical Techniques in Micro- and Nanotechnology we lay the foundations for a qualitative and quantitative theoretical understanding of micro-and nano-electromechanical systems, i.e., MEMS and NEMS. In integrated circuits (ICs), MEMS and NEMS, silicon (Si) is still the substrate and construction material of choice"--
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Click to ask Cornell University Library to RUSH purchase. We will contact you by email when it arrives (typically within a week).
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