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概要
書目資訊
主題
Microelectromechanical systems - Design and construction.
概要
作品:
4 作品在 4 項出版品 4 種語言
書目資訊
CMOS cantilever sensor systems :atomic force microscopy and gas sensing applications /
by:
(書目-語言資料,印刷品)
Mechanical microsensors /
by:
(書目-語言資料,印刷品)
MEMS :design and fabrication /
by:
(書目-電子資源)
Micro electro mechanical system design /
by:
(書目-電子資源)
主題
Detectors- Design and construction.
Silicon.
Micromachining.
Engineering design.
Microelectromechanical systems- Design and construction.
Levers- Design and construction.
Atomic force microscopy- Equipment and supplies
Transducers.
Metal oxide semiconductors, Complementary- Design and construction.
Gas detectors- Design and construction.
Microfabrication.
處理中
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