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Low dielectric constant materials fo...

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Ho, P. S.

Low dielectric constant materials for IC applications /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Low dielectric constant materials for IC applications // P.S. Ho, W.W. Lee, J. Leu (eds.).
other author:	Ho, P. S.
Published:	Berlin ;Springer,2003.
Description:	xix, 309 p. :ill. ;24 cm.
Series:	Springer series in advanced microelectronics,
Subject:	Electric insulators and insulation. -
ISBN:	3540678190 (hbk. : alk. paper) :

Low dielectric constant materials for IC applications /
Low dielectric constant materials for IC applications /P.S. Ho, W.W. Lee, J. Leu (eds.). - Berlin ;Springer,2003. - xix, 309 p. :ill. ;24 cm. - Springer series in advanced microelectronics,91437-0387 ;.

Includes bibliographical references and index.

ISBN: 3540678190 (hbk. : alk. paper) :NT3575

LCCN: 2002066982Subjects--Topical Terms:

159024
Electric insulators and insulation.

LC Class. No.: TK3401 / .L69 2002

Dewey Class. No.: 621.3815

Low dielectric constant materials for IC applications /
LDR:00728nam _22002178a_450 001 136299
003 DLC
005 20031019164218.0
008 020418s2003 gw a b 001 0 eng
010 $a 2002066982
020 $a 3540678190 (hbk. : alk. paper) : $c NT3575
035 $a 00074275
040 $a DLC $c DLC
042 $a pcc
050 0 0 $a TK3401 $b .L69 2002
082 0 0 $a 621.3815 $2 21
092 $a */621.3815/L912/2003////E00897
245 0 0 $a Low dielectric constant materials for IC applications / $c P.S. Ho, W.W. Lee, J. Leu (eds.).
260 $a Berlin ; $a New York : $b Springer, $c 2003.
300 $a xix, 309 p. : $b ill. ; $c 24 cm.
440 0 $a Springer series in advanced microelectronics, $x 1437-0387 ; $v 9
504 $a Includes bibliographical references and index.
650 0 $a Electric insulators and insulation. $3 159024
650 0 $a Dielectrics. $3 159025
650 0 $a Integrated circuits. $3 158459
700 1 $a Ho, P. S. $3 159021
700 1 $a Lee, Wei William. $3 159022
700 1 $a Leu, J. $q (Jihperng), $d 1958- $3 159023

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