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MEMS mechanical sensors /

紀錄類型:	書目-語言資料,印刷品 : 單行本
正題名/作者:	MEMS mechanical sensors // Stephen Beeby ... [et al.].
其他作者:	Beeby, Stephen.
出版者:	Boston :Artech House,c2004.
面頁冊數:	x, 269 p. :ill. ;26 cm.
Subject:	Microelectromechanical systems. -
ISBN:	1580535364 (hbk.) :

MEMS mechanical sensors /
LDR:00612cam _2200205 a_450 001 140625
003 DLC
005 20050119112936.0
008 040308s2004 maua b 001 0 eng
010 $a 2004046158
020 $a 1580535364 (hbk.) : $c NT3511
035 $a 00112015
040 $a DLC $c DLC $d DLC
042 $a pcc
050 0 0 $a TK7875 $b .M4537 2004
082 0 0 $a 681/.2 $2 22
245 0 0 $a MEMS mechanical sensors / $c Stephen Beeby ... [et al.].
260 $a Boston : $b Artech House, $c c2004.
300 $a x, 269 p. : $b ill. ; $c 26 cm.
490 1 $a Artech House microelectromechanical system series
504 $a Includes bibliographical references and index.
650 0 $a Microelectromechanical systems. $3 155435
650 0 $a Detectors. $3 148168
700 1 $a Beeby, Stephen. $3 169928
830 0 $a Microelectromechanical systems series. $3 169929

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