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Mechanical microsensors /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Mechanical microsensors // M. Elwenspoek, R.J. Wiergerink.
Author:	Elwenspoek, M.
other author:	Wiegerink, Remco J.,
Published:	Berlin ;Springer,c2001.
Description:	x, 295 p. :ill. ;25 cm.
Series:	Microtechnology and MEMS
Subject:	Detectors - Design and construction. -
ISBN:	3540675825 (hbk. : alk. paper) :

Mechanical microsensors /
Elwenspoek, M.1948-

Mechanical microsensors /M. Elwenspoek, R.J. Wiergerink. - Berlin ;Springer,c2001. - x, 295 p. :ill. ;25 cm. - Microtechnology and MEMS.

Includes bibliographical references and index.

ISBN: 3540675825 (hbk. : alk. paper) :NT3561

LCCN: 00057363 Subjects--Topical Terms:

169926
Detectors
--Design and construction.

LC Class. No.: TK7875 / .E49 2001

Dewey Class. No.: 681/.2

Mechanical microsensors /
LDR:00609cam _2200205 a_450 001 140624
003 DLC
005 20010228144723.0
008 000623s2001 gw a b 001 0 eng
010 $a 00057363
020 $a 3540675825 (hbk. : alk. paper) : $c NT3561
035 $a 00112014
040 $a DLC $c DLC
042 $a pcc
050 0 0 $a TK7875 $b .E49 2001
082 0 0 $a 681/.2 $2 21
100 1 $a Elwenspoek, M. $q (Miko), $d 1948- $3 169924
245 1 0 $a Mechanical microsensors / $c M. Elwenspoek, R.J. Wiergerink.
260 $a Berlin ; $a New York : $b Springer, $c c2001.
300 $a x, 295 p. : $b ill. ; $c 25 cm.
440 0 $a Microtechnology and MEMS
504 $a Includes bibliographical references and index.
650 0 $a Detectors $x Design and construction. $3 169926
650 0 $a Microelectromechanical systems $x Design and construction. $3 158277
650 0 $a Transducers. $3 157052
650 0 $a Silicon. $3 155462
650 0 $a Micromachining. $3 169927
700 1 $a Wiegerink, Remco J., $d 1964- $3 169925

0 based onreview(s)

Location: Year: Volume Number:

Items

1 records • Pages 1 •
1

No. of reservations

E07429

六樓西文書庫 (6th Floor-Western Books)

一般借閱

外文書

* 681.2 E52 2001

一般(Normal)

在架

0

5030000-0950005

1 筆 • 頁數 1 •
1

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