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Characterization of diffractive opti...
~
Hollandsworth, Christopher W.
Characterization of diffractive optical lenses for use in MEMS integrated optical monitoring.
紀錄類型:
書目-電子資源 : 單行本
正題名/作者:
Characterization of diffractive optical lenses for use in MEMS integrated optical monitoring./
作者:
Hollandsworth, Christopher W.
面頁冊數:
143 p.
附註:
Source: Masters Abstracts International, Volume: 44-06, page: 2915.
Contained By:
Masters Abstracts International44-06.
標題:
Engineering, Electronics and Electrical. -
電子資源:
Download PDF (下載PDF全文)
ISBN:
9780542761850
Characterization of diffractive optical lenses for use in MEMS integrated optical monitoring.
Hollandsworth, Christopher W.
Characterization of diffractive optical lenses for use in MEMS integrated optical monitoring.
- 143 p.
Source: Masters Abstracts International, Volume: 44-06, page: 2915.
Thesis (M.S.E.E.)--West Virginia University, 2006.
Micro Electro Mechanical Machines (MEMS) are finding use in an increasing number of applications. Many of these applications, especially safety critical ones, require continuous knowledge of the operational status of the MEMS device over its lifetime. In-situ monitoring of the operational status of these devices is better suited to optical methods which provide a non-invasive way of continuously determining device position as a function of time. This data is central to determining the MEMS state and operational condition. Whether the optical source is internal to the MEMS package or external to the package and introduced via optical fiber, lenses will be required within the package to focus the MEMS optical probe beam to and from the test device. The need for hybrid co-integration with the MEMS die within its package results in physical dimension and focal length constraints on the lenses used and points toward the applicability of diffractive optical lenses to realize the goal of MEMS in-situ integrated optical monitoring. The spot diameter must be of a width comparable to any lateral displacement that must be measured so that acceptable resolution of the motion can be observed. Diffractive lenses are capable of meeting all of these requirements. Previous work designed and fabricated Fresnel binary phase diffractive lenses in borofloat glass substrates as a means to achieve the required lens function for either a visible (632 nm wavelength) or near IR (1310 nm) probe beam. This work undertakes the full optical characterization of these previously fabricated lenses, compares their performance (spot size, focal length, efficiency) to that expected from theory, and determines if they meet the original lens design criteria, These results enable an initial assessment of these lenses for use in MEMS in-situ lifetime optical monitoring.
ISBN: 9780542761850Subjects--Topical Terms:
170927
Engineering, Electronics and Electrical.
Characterization of diffractive optical lenses for use in MEMS integrated optical monitoring.
LDR
:02800nmm 2200277 4500
001
1000004978
005
20070601084750.5
008
070601s2006 eng d
020
$a
9780542761850
035
$a
(UnM)AAI1436629
035
$a
AAI1436629
040
$a
UnM
$c
UnM{me_controlnum}
100
1
$a
Hollandsworth, Christopher W.
$3
1000006144
245
1 0
$a
Characterization of diffractive optical lenses for use in MEMS integrated optical monitoring.
300
$a
143 p.
500
$a
Source: Masters Abstracts International, Volume: 44-06, page: 2915.
500
$a
Adviser: Lawrence Hornak.
502
$a
Thesis (M.S.E.E.)--West Virginia University, 2006.
520
$a
Micro Electro Mechanical Machines (MEMS) are finding use in an increasing number of applications. Many of these applications, especially safety critical ones, require continuous knowledge of the operational status of the MEMS device over its lifetime. In-situ monitoring of the operational status of these devices is better suited to optical methods which provide a non-invasive way of continuously determining device position as a function of time. This data is central to determining the MEMS state and operational condition. Whether the optical source is internal to the MEMS package or external to the package and introduced via optical fiber, lenses will be required within the package to focus the MEMS optical probe beam to and from the test device. The need for hybrid co-integration with the MEMS die within its package results in physical dimension and focal length constraints on the lenses used and points toward the applicability of diffractive optical lenses to realize the goal of MEMS in-situ integrated optical monitoring. The spot diameter must be of a width comparable to any lateral displacement that must be measured so that acceptable resolution of the motion can be observed. Diffractive lenses are capable of meeting all of these requirements. Previous work designed and fabricated Fresnel binary phase diffractive lenses in borofloat glass substrates as a means to achieve the required lens function for either a visible (632 nm wavelength) or near IR (1310 nm) probe beam. This work undertakes the full optical characterization of these previously fabricated lenses, compares their performance (spot size, focal length, efficiency) to that expected from theory, and determines if they meet the original lens design criteria, These results enable an initial assessment of these lenses for use in MEMS in-situ lifetime optical monitoring.
590
$a
School code: 0256.
650
4
$a
Engineering, Electronics and Electrical.
$3
170927
650
4
$a
Physics, Optics.
$3
1000005523
690
$a
0544
690
$a
0752
710
2 0
$a
West Virginia University.
$3
1000005881
773
0
$t
Masters Abstracts International
$g
44-06.
790
1 0
$a
Hornak, Lawrence,
$e
advisor
790
$a
0256
791
$a
M.S.E.E.
792
$a
2006
856
4 0
$u
http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=1436629
$z
Download PDF (下載PDF全文)
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