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Fully monolithic CMOS nickel microme...
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Huang, Wen-Lung.
Fully monolithic CMOS nickel micromechanical resonator oscillator for wireless communications.
紀錄類型:
書目-電子資源 : 單行本
正題名/作者:
Fully monolithic CMOS nickel micromechanical resonator oscillator for wireless communications./
作者:
Huang, Wen-Lung.
面頁冊數:
126 p.
附註:
Source: Dissertation Abstracts International, Volume: 69-03, Section: B, page: 1829.
Contained By:
Dissertation Abstracts International69-03B.
標題:
Engineering, Electronics and Electrical. -
電子資源:
Download PDF (下載PDF全文)
ISBN:
9780549509431
Fully monolithic CMOS nickel micromechanical resonator oscillator for wireless communications.
Huang, Wen-Lung.
Fully monolithic CMOS nickel micromechanical resonator oscillator for wireless communications.
- 126 p.
Source: Dissertation Abstracts International, Volume: 69-03, Section: B, page: 1829.
Thesis (Ph.D.)--University of Michigan, 2008.
A nickel surface-micromachining technology offering various electrode-to-resonator gap materials is presented that is particularly suitable for high- Q, low impedance MEMS-based vibrating resonators. The low temperature of this nickel fabrication technology makes it amenable to post-processing over finished foundry CMOS wafers, even those using advanced low-k, low temperature dielectrics around metallization to decrease interconnect capacitance. Such a MEMS-last process technology is used in this work to demonstrate a fully monolithic MEMS-based oscillator comprised of a nickel disk resonator array surface-micromachined over foundry CMOS.
ISBN: 9780549509431Subjects--Topical Terms:
170927
Engineering, Electronics and Electrical.
Fully monolithic CMOS nickel micromechanical resonator oscillator for wireless communications.
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Source: Dissertation Abstracts International, Volume: 69-03, Section: B, page: 1829.
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Advisers: Clark T. C. Nguyen; Michel M. Maharbiz.
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A nickel surface-micromachining technology offering various electrode-to-resonator gap materials is presented that is particularly suitable for high- Q, low impedance MEMS-based vibrating resonators. The low temperature of this nickel fabrication technology makes it amenable to post-processing over finished foundry CMOS wafers, even those using advanced low-k, low temperature dielectrics around metallization to decrease interconnect capacitance. Such a MEMS-last process technology is used in this work to demonstrate a fully monolithic MEMS-based oscillator comprised of a nickel disk resonator array surface-micromachined over foundry CMOS.
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To achieve resonator motional resistances below 5.8kΩ with adequate quality factor, a mechanically-coupled array of resonators is used that actually realizes a multi-pole filter structure, from which a single mode can be selected and other modes can be suppressed by proper electrode phasing. To attain higher frequencies, a nickel wine-glass mode disk resonator with a nitride capacitive transducer gaps was demonstrated at frequencies approaching 60 MHz with Q's as high as 54,507, which is the highest to date for any micro-scale metal resonator in the VHF range. To boost frequencies to the UHF range, vibrating nickel micromechanical spoke-supported ring resonators were demonstrated at 425.7 MHz with Q's as high as 2,467. These devices employed an anchor isolating spoke-supported ring geometry along with notched support attachments between the ring structure and supporting beams to achieve the highest reported vibrating frequency to date for any micro-scale metal resonator.
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Finally, a fully monolithic oscillator was achieved using MEMS-last integration to fabricate a resonator array of nine nickel flexural-mode disks over foundry CMOS circuitry. The oscillator demonstrated a measured phase noise of -95 dBc/Hz at a 10 kHz offset from its 10.92-MHz carrier frequency, which is adequate for some low-end timing applications. This, together with its low power consumption of 350 muW, and the potential for full integration of integrated circuits and MEMS devices onto a single chip, makes the fully monolithic CMOS nickel micromechanical disk-array resonator oscillator presented here a reasonable on-chip replacement for quartz crystal reference oscillators in low-end applications.
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Download PDF (下載PDF全文)
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