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Elwenspoek, M.1948-

Overview

Works:	1 works in 1 publications in 1 languages

Titles

Mechanical microsensors / by: Elwenspoek, M.1948-; Wiegerink, Remco J.,1964- (Language materials, printed)

Subjects

Detectors- Design and construction. Silicon. Micromachining. Microelectromechanical systems- Design and construction. Transducers.

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