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Fundamentals of microfabrication and nanotechnology /

紀錄類型:	書目-語言資料,印刷品 : 單行本
正題名/作者:	Fundamentals of microfabrication and nanotechnology // Marc J. Madou.
作者:	Madou, Marc J.
出版者:	Boca Raton, FL :CRC Press,c2012.
面頁冊數:	3 v. :ill. (some col.) ;29 cm.
標題:	Microelectromechanical systems. -
電子資源:	Click to ask Cornell University Library to RUSH purchase. We will contact you by email when it arrives (typically within a week).
ISBN:	9781420055160 (v. 3) :
ISBN:	142005516X (v. 3)
ISBN:	9781420055191 (v. 2) :
ISBN:	1420055194 (v. 2)
ISBN:	9781420055115 (v. 1)
ISBN:	1420055119 (v. 1)

Fundamentals of microfabrication and nanotechnology /
Madou, Marc J.

Fundamentals of microfabrication and nanotechnology /Marc J. Madou. - 3rd ed. - Boca Raton, FL :CRC Press,c2012. - 3 v. :ill. (some col.) ;29 cm.

Includes bibliographical references and indexes.

v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-NEMS, Manufacturaing techniques and applications.

"Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download, along with a solutions manual for qualifying instructors"--

ISBN: 9781420055160 (v. 3) :NT2884

LCCN: 2011014406Subjects--Topical Terms:

155435
Microelectromechanical systems.

LC Class. No.: TK7875 / M33 2012

Dewey Class. No.: 621.381

Fundamentals of microfabrication and nanotechnology /
LDR:02497cam a2200325 a 4500 001 1000001545
003 DLC
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020 $a 9781420055160 (v. 3) : $c NT2884
020 $a 142005516X (v. 3)
020 $a 9781420055191 (v. 2) : $c NT1454
020 $a 1420055194 (v. 2)
020 $a 9781420055115 (v. 1)
020 $a 1420055119 (v. 1)
035 $a (OCoLC)ocn727047810
035 $a 2011014406
040 $a DLC $c DLC $d YDX $d YDXCP $d CDX $d COO $d MYPMP $d DLC
042 $a pcc
050 0 0 $a TK7875 $b M33 2012
082 0 0 $2 23 $a 621.381
100 1 $a Madou, Marc J. $3 1000001899
245 1 0 $a Fundamentals of microfabrication and nanotechnology / $c Marc J. Madou.
250 $a 3rd ed.
260 # $a Boca Raton, FL : $b CRC Press, $c c2012.
300 $a 3 v. : $b ill. (some col.) ; $c 29 cm.
504 $a Includes bibliographical references and indexes.
505 0 # $a v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-NEMS, Manufacturaing techniques and applications.
520 # $a "Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download, along with a solutions manual for qualifying instructors"-- $c Provided by publisher.
520 # $a "In Solid State Physics, Fluidics and Analytical Techniques in Micro- and Nanotechnology we lay the foundations for a qualitative and quantitative theoretical understanding of micro-and nano-electromechanical systems, i.e., MEMS and NEMS. In integrated circuits (ICs), MEMS and NEMS, silicon (Si) is still the substrate and construction material of choice"-- $c Provided by publisher.
650 # 0 $a Microelectromechanical systems. $3 155435
650 # 0 $a Nanoelectromechanical systems. $3 1000001900
650 # 0 $a Microfluidics. $3 172012
650 # 0 $a Solid-state physics. $3 154949
856 # # $u http://pda.library.cornell.edu/coutts/pod.cgi?CouttsID=cou7021486 $z Click to ask Cornell University Library to RUSH purchase. We will contact you by email when it arrives (typically within a week).