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Imaging interferometric microscopy: ...

Kuznetsova, Yuliya.

Imaging interferometric microscopy: Resolution to the limit of frequency space.

レコード種別:	コンピュータ・メディア : 単行資料
タイトル / 著者:	Imaging interferometric microscopy: Resolution to the limit of frequency space./
著者:	Kuznetsova, Yuliya.
記述:	120 p.
注記:	Source: Dissertation Abstracts International, Volume: 68-08, Section: B, page: 5321.
含まれています:	Dissertation Abstracts International68-08B.
主題:	Physics, Optics. -
電子資源:	Download PDF (下載PDF全文)
国際標準図書番号 (ISBN):	9780549159834

Imaging interferometric microscopy: Resolution to the limit of frequency space.
Kuznetsova, Yuliya.

Imaging interferometric microscopy: Resolution to the limit of frequency space. - 120 p.

Source: Dissertation Abstracts International, Volume: 68-08, Section: B, page: 5321.

Thesis (Ph.D.)--The University of New Mexico, 2007.

We demonstrate an increase of resolution over conventional microscopy configuration optical system using imaging interferometric microscopy (IIM), which is related to holography, synthetic aperture imaging and off-axis/dark-field illumination techniques. This involves both off-axis coherent illumination and re-injection of appropriate zero-order reference beams onto the image plane for image formation.

ISBN: 9780549159834Subjects--Topical Terms:

1000005523
Physics, Optics.

Imaging interferometric microscopy: Resolution to the limit of frequency space.
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245 1 0 $a Imaging interferometric microscopy: Resolution to the limit of frequency space.
300 $a 120 p.
500 $a Source: Dissertation Abstracts International, Volume: 68-08, Section: B, page: 5321.
500 $a Adviser: S. R. J. Brueck.
502 $a Thesis (Ph.D.)--The University of New Mexico, 2007.
520 $a We demonstrate an increase of resolution over conventional microscopy configuration optical system using imaging interferometric microscopy (IIM), which is related to holography, synthetic aperture imaging and off-axis/dark-field illumination techniques. This involves both off-axis coherent illumination and re-injection of appropriate zero-order reference beams onto the image plane for image formation.
520 $a First, in this dissertation, a simple case of IIM is presented where only one offset exposure in each direction was used. This allows 0.5 mum (0.8 lambda) feature resolution using 0.4 NA (numerical aperture) objective and 633 nm illumination source in contrast with conventional microscope resolution limited by 0.6lambda/NA=1.5lambda&sim;950 nm.
520 $a After that, we show the extension of frequency space coverage to 1+ NA using two offset sub-images in each direction. Position and intensity of the sub-images are determined by comparison of the reference object with corresponding simulations by MSE (mean-square-error) calculation. We describe image distortions due to the subimages overlapping in Fourier space and show the necessity of filtering images.
520 $a Then, we approach the lambda/4 theoretical linear systems limits of optical resolution by tilting the object plane. We describe the frequency space distortions due to the nonlinear frequency transformation, associated with a non unaxial optical system and propose the method of the frequencies recalculation. After fast Fourier transform (FFT) of the experimental (distorted) real space high-frequency sub-image is taken to provide a frequency space, the experimental frequencies are corrected. Fractional frequencies are used for the inverse transform or interpolation (both amplitude and phase) to assign values to the nearest frequencies on the appropriate grid. Images are reconstructed after converting back to real space.
520 $a In the present experiments, the frequency space coverage extends to 1.87/lambda, or to a pitch of 170 nm using a 633-nm wavelength source. These results are achieved using a modest 0.4-NA optical system and retain the working distance, field-of-view and depth-of-field advantages of low NA systems while approaching ultimate linear-systems resolution limits. Extension of this approach to 193-nm immersion provides a route to < 40-nm resolution optical microscopy.
520 $a This technique may be useful for solving defocusing problems, mask inspection, biological research and other applications.
590 $a School code: 0142.
650 4 $a Physics, Optics. $3 1000005523
690 $a 0752
710 2 $a The University of New Mexico. $3 1000005571
773 0 $t Dissertation Abstracts International $g 68-08B.
790 1 0 $a Brueck, S. R. J., $e advisor
790 $a 0142
791 $a Ph.D.
792 $a 2007
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