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MEMS and NEMS :systems, devices, and structures /

紀錄類型:	書目-語言資料,印刷品 : 單行本
正題名/作者:	MEMS and NEMS :/ Sergey Edward Lyshevski.
其他題名:	systems, devices, and structures /
作者:	Lyshevski, Sergey Edward.
出版者:	Boca Raton, Fla. :CRC Press,c2002.
面頁冊數:	461 p. :ill. ;25 cm.
叢書名:	Nano- and microscience, engineering, technology, and medicine series
標題:	Microelectromechanical systems. -
ISBN:	0849312620 (hbk.) :

MEMS and NEMS :systems, devices, and structures /
Lyshevski, Sergey Edward.

MEMS and NEMS :systems, devices, and structures /Sergey Edward Lyshevski. - Boca Raton, Fla. :CRC Press,c2002. - 461 p. :ill. ;25 cm. - Nano- and microscience, engineering, technology, and medicine series.

Includes bibliographical references and index.

ISBN: 0849312620 (hbk.) :NT3383

LCCN: 2001049944Subjects--Topical Terms:

155435
Microelectromechanical systems.

LC Class. No.: TK7875 / .L9597 2002

Dewey Class. No.: 621.381

MEMS and NEMS :systems, devices, and structures /
LDR:00692nam _2200205 a_450 001 134849
005 19991114195047.0
008 021119s2002 flua b 001 0 eng d
010 $a 2001049944
020 $a 0849312620 (hbk.) : $c NT3383
035 $a 00064301
040 $a DLC $c DLC $d DLC
042 $a pcc
050 0 0 $a TK7875 $b .L9597 2002
082 0 0 $a 621.381 $2 21
092 $a */621.381/L993/2002////097880
100 1 $a Lyshevski, Sergey Edward. $3 155434
245 1 0 $a MEMS and NEMS : $b systems, devices, and structures / $c Sergey Edward Lyshevski.
260 $a Boca Raton, Fla. : $b CRC Press, $c c2002.
300 $a 461 p. : $b ill. ; $c 25 cm.
440 0 $a Nano- and microscience, engineering, technology, and medicine series
504 $a Includes bibliographical references and index.
650 0 $a Microelectromechanical systems. $3 155435

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