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CMOS cantilever sensor systems :atom...

Baltes, H.

CMOS cantilever sensor systems :atomic force microscopy and gas sensing applications /

Record Type:	Language materials, printed : Monograph/item
正題名/作者:	CMOS cantilever sensor systems :/ D. Lange, O. Brand, H. Baltes.
其他題名:	atomic force microscopy and gas sensing applications /
作者:	Lange, D.
其他作者:	Brand, Oliver,
出版者:	Berlin ;Springer,c2002.
面頁冊數:	viii, 142 p. :ill. ;25 cm.
叢書名:	Microtechnology and MEMS
標題:	Microelectromechanical systems - Design and construction. -
ISBN:	3540431438 (hbk. : alk. paper) :

CMOS cantilever sensor systems :atomic force microscopy and gas sensing applications /
Lange, D.1970-

CMOS cantilever sensor systems :atomic force microscopy and gas sensing applications /D. Lange, O. Brand, H. Baltes. - Berlin ;Springer,c2002. - viii, 142 p. :ill. ;25 cm. - Microtechnology and MEMS.

Includes bibliographical references (p. [131]-140) and index.

ISBN: 3540431438 (hbk. : alk. paper) :NT2145

LCCN: 2002067245Subjects--Topical Terms:

158277
Microelectromechanical systems
--Design and construction.

LC Class. No.: TK7875 / .L36 2002

Dewey Class. No.: 681/.413

CMOS cantilever sensor systems :atomic force microscopy and gas sensing applications /
LDR:00742nam _22002174a_450 001 135975
003 DLC
005 20031018112014.0
008 020403s2002 gw a b 001 0 eng
010 $a 2002067245
020 $a 3540431438 (hbk. : alk. paper) : $c NT2145
035 $a 00073951
040 $a DLC $c DLC $d DLC
042 $a pcc
050 0 0 $a TK7875 $b .L36 2002
082 0 0 $a 681/.413 $2 21
092 $a */681.413/L269/2002////E00540
100 1 $a Lange, D. $q ( Dirk), $d 1970- $3 158274
245 1 0 $a CMOS cantilever sensor systems : $b atomic force microscopy and gas sensing applications / $c D. Lange, O. Brand, H. Baltes.
260 $a Berlin ; $a New York : $b Springer, $c c2002.
300 $a viii, 142 p. : $b ill. ; $c 25 cm.
440 0 $a Microtechnology and MEMS
504 $a Includes bibliographical references (p. [131]-140) and index.
650 0 $a Microelectromechanical systems $x Design and construction. $3 158277
650 0 $a Metal oxide semiconductors, Complementary $x Design and construction. $3 146861
650 0 $a Levers $x Design and construction. $3 158278
650 0 $a Atomic force microscopy $x Equipment and supplies $x Design and construction. $3 158279
650 0 $a Gas detectors $x Design and construction. $3 158280
700 1 $a Brand, Oliver, $d 1964- $3 158275
700 1 $a Baltes, H. $q (Henry) $3 158276