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Nano- and microelectromechanical systems :fundamentals of nano- and microengineering /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Nano- and microelectromechanical systems :/ Sergey Edward Lyshevski.
Reminder of title:	fundamentals of nano- and microengineering /
Author:	Lyshevski, Sergey Edward.
Published:	Boca Raton :CRC Press,c2001.
Description:	338 p. :ill. ;25 cm.
Series:	Nano- and microscience, engineering, technology, and medicine series
Subject:	Microelectromechanical systems. -
ISBN:	0849309166 (bound)

Nano- and microelectromechanical systems :fundamentals of nano- and microengineering /
Lyshevski, Sergey Edward.

Nano- and microelectromechanical systems :fundamentals of nano- and microengineering /Sergey Edward Lyshevski. - Boca Raton :CRC Press,c2001. - 338 p. :ill. ;25 cm. - Nano- and microscience, engineering, technology, and medicine series.

Includes bibliographical references and index.

ISBN: 0849309166 (bound)NT1180Subjects--Topical Terms:

155435
Microelectromechanical systems.

LC Class. No.: TK7875 / .L96 2000

Dewey Class. No.: 621.381

Nano- and microelectromechanical systems :fundamentals of nano- and microengineering /
LDR:00616nam _2200169a _450 001 137440
008 140815s2001 flua 001 0 eng
020 $a 0849309166 (bound) $c NT1180
035 $a 00080787
040 $a DLC $c DLC $d DLC
042 $a pcc
050 0 0 $a TK7875 $b .L96 2000
082 0 0 $a 621.381 $2 21
100 1 $a Lyshevski, Sergey Edward. $3 155434
245 1 0 $a Nano- and microelectromechanical systems : $b fundamentals of nano- and microengineering / $c Sergey Edward Lyshevski.
260 $a Boca Raton : $b CRC Press, $c c2001.
300 $a 338 p. : $b ill. ; $c 25 cm.
440 0 $a Nano- and microscience, engineering, technology, and medicine series
504 $a Includes bibliographical references and index.
650 0 $a Microelectromechanical systems. $3 155435