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Task-Based Assessment of a Proposed ...

Rogala, Eric Waldemar.

Task-Based Assessment of a Proposed Phase-Shifting Interferometer/Ellipsometer /

紀錄類型:	書目-語言資料,印刷品 : 單行本
正題名/作者:	Task-Based Assessment of a Proposed Phase-Shifting Interferometer/Ellipsometer // Eric Waldemar Rogala.
作者:	Rogala, Eric Waldemar.
出版者:	Ann Arbor, MI. :UMI,2000.
面頁冊數:	777 p. :ill. ;22 cm.
附註:	Includes abstract.
標題:	Optics. -

Task-Based Assessment of a Proposed Phase-Shifting Interferometer/Ellipsometer /
Rogala, Eric Waldemar.

Task-Based Assessment of a Proposed Phase-Shifting Interferometer/Ellipsometer /Eric Waldemar Rogala. - Ann Arbor, MI. :UMI,2000. - 777 p. :ill. ;22 cm.

Includes abstract.

Thesis (Ph.D.)--University of Arizona, 1999.

Includes bibliographical references.

In this dissertation, we offer a novel phase-shifting interferometer/ellipsometer. The uniqueness arises from the fact that this study is the consolidation of four distinct ideas drawn from the field of optics and the field of statistics. A conventional four-step phase-shifting interferometer is modified to allow for both TE and TM polarized measurements. Maximum-likelihood estimation theory is then used to extract the three parameters of interest, namely the real and imaginary components of the complex index of refraction and the surface profile. Finally, Cramer-Rao lower bounds serve as a quantitative means of assessing the particular system design at the task of estimating the three parameters in question.

Standard No.: 9780599612112 (pbk.) NT2675Subjects--Topical Terms:

146960
Optics.

Dewey Class. No.: 535

Task-Based Assessment of a Proposed Phase-Shifting Interferometer/Ellipsometer /
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005 20001128000311.5
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024 $a 9780599612112 (pbk.) $c NT2675
035 $a 00113977
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100 1 $a Rogala, Eric Waldemar. $3 170959
245 1 0 $a Task-Based Assessment of a Proposed Phase-Shifting Interferometer/Ellipsometer / $c Eric Waldemar Rogala.
260 $a Ann Arbor, MI. : $b UMI, $c 2000.
300 $a 777 p. : $b ill. ; $c 22 cm.
500 $a Includes abstract.
500 $a UMI no.9957940
502 $a Thesis (Ph.D.)--University of Arizona, 1999.
504 $a Includes bibliographical references.
520 $a In this dissertation, we offer a novel phase-shifting interferometer/ellipsometer. The uniqueness arises from the fact that this study is the consolidation of four distinct ideas drawn from the field of optics and the field of statistics. A conventional four-step phase-shifting interferometer is modified to allow for both TE and TM polarized measurements. Maximum-likelihood estimation theory is then used to extract the three parameters of interest, namely the real and imaginary components of the complex index of refraction and the surface profile. Finally, Cramer-Rao lower bounds serve as a quantitative means of assessing the particular system design at the task of estimating the three parameters in question.
650 0 $a Optics. $3 146960
710 2 $a University of Arizona. $3 170938