Micromachining.

Mechanical microsensors / …で: (言語・文字資料 (印刷物))

Micromanufacturing :international assessment of research and development / …で: (言語・文字資料 (印刷物))

Micromachining using electrochemical discharge phenomenonfundamentals and applications of spark assisted chemical engraving / …で: (コンピュータ・メディア)

Detectors- Design and construction.

Silicon.

Electrochemical cutting.

Micromachining.

Electric discharges- Industrial applications.

Microelectromechanical systems- Design and construction.

Plasma etching.

Transducers.

Microfabrication.