Micromachining.

Mechanical microsensors / by: (書目-語言資料,印刷品)

Micromanufacturing :international assessment of research and development / by: (書目-語言資料,印刷品)

Micromachining using electrochemical discharge phenomenonfundamentals and applications of spark assisted chemical engraving / by: (書目-電子資源)

Detectors- Design and construction.

Silicon.

Electrochemical cutting.

Micromachining.

Electric discharges- Industrial applications.

Microelectromechanical systems- Design and construction.

Plasma etching.

Transducers.

Microfabrication.