Microelectromechanical systems - Design and construction.

CMOS cantilever sensor systems :atomic force microscopy and gas sensing applications / by: (Language materials, printed)

Mechanical microsensors / by: (Language materials, printed)

MEMS :design and fabrication / by: (Electronic resources)

Micro electro mechanical system design / by: (Electronic resources)

Detectors- Design and construction.

Silicon.

Micromachining.

Engineering design.

Microelectromechanical systems- Design and construction.

Levers- Design and construction.

Atomic force microscopy- Equipment and supplies

Transducers.

Metal oxide semiconductors, Complementary- Design and construction.

Gas detectors- Design and construction.

Microfabrication.