Microelectromechanical systems - Design and construction.

CMOS cantilever sensor systems :atomic force microscopy and gas sensing applications / …で: (言語・文字資料 (印刷物))

Mechanical microsensors / …で: (言語・文字資料 (印刷物))

MEMS :design and fabrication / …で: (コンピュータ・メディア)

Micro electro mechanical system design / …で: (コンピュータ・メディア)

Detectors- Design and construction.

Silicon.

Micromachining.

Engineering design.

Microelectromechanical systems- Design and construction.

Levers- Design and construction.

Atomic force microscopy- Equipment and supplies

Transducers.

Metal oxide semiconductors, Complementary- Design and construction.

Gas detectors- Design and construction.

Microfabrication.